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Battery device applications - diffusion quartz boat loaders

2023-03-20(712) Views

Battery device applications - diffusion quartz boat loaders

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The silicon wafer in the quartz boat after the diffusion process is automatically removed and loaded into the flower basket. And the silicon wafer without diffusion process is automatically removed from the basket and loaded into the quartz boat

ZX-S178-S134 do quartz boat loading and unloading materials


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